Investigation of Fracture Characteristic in Thermally Aged Thin Films of Diamond-like Carbon

Seung Baek, Se-Jun Park, Kwang-Ryeol Lee, Chang-Sung Seok,
 

To investigate the chemical and mechanical stability of DLC films at 300℃, we performed thermally aging for different aging times (0: virgin, 24, 48 hours). From the Raman spectra analyses, the indentation tests, and the total work fracture data, we confirmed that the aged sample-2 (precursor gas: C₆H₁₄) had better mechanical characteristics and thermal stabilities than the aged sample-1(precursor gas: C₆H₆). Also, the fracture toughness is found to decrease with increasing ratio of the intensities of the D- and G-peaks in Raman spectroscopy.