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대한금속재료학회지, 47 (1), 32-37 (2009) [pdf] | ||
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Tersoff 포텐셜을 이용한 Si (001) 미사면 거동에 대한 분자동력학적 연구 |
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최정혜, 차필령, 이승철,
오정수, 이광렬 |
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Molecular dynamic simulations on the structural evolution of the Si(001) vicinal surfaces, which are tilted with respect to [100] and [110] directions were performed by using the empirical Tersoff potential. Tersoff potential was implemented at LAMMPS code and confirmed to describe the properties of Si. When the steps are generated along [100] direction, symmetric dimer rows formed with respect to the step edges. On the other hand, when the steps are generated along [110] direction, alternating dimer rows form with respect to the step edges. The configurational differences between the two vicinal surfaces are discussed in terms of the surface diffusion. |
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