실리콘이 첨가된 다이아몬드상 카본필름의 트라이볼로지적 특성에 미치는 환경변화의 영향

양승호, 공호성, 이광렬, 박세준, 김대은 
 

An experimental study was performed to discover the effect of environment on the tribological behavior of Si incorporated diamond-like carbon (Si-DLC) film slid on a steel ball. The films were deposited on Si (100) wafers by a radio-frequency glow discharge of mixtures of benzene and dilute silane gases. Experiments using a ball-on-disk test-rig was performed in vacuum, dry air and ambient air conditions. It was observed that coefficient of friction decreased as the environment changed from vacuum, to dry air. Chemical analysis of debris suggested that low and stable friction is closely related to the formation of silicon-rich oxide debris and the rolling action.