Sculpting on Polymers using Focused Ion Beam

M.-W. Moon E.-K. Her, K. H. Oh, K.-R. Lee, and A. Vaziri
 

It has been recently shown that ordered surface wrinkles can be created on the surface of polymers using focused ion beam irradiation. Here, we provide an overview of the techniques developed for controlled creation of nanoscale wrinkling patterns on the surface of the polymers using focused ion beam. Moreover, some of the key experimental challenges for precise fabrication of wrinkling patterns were investigated by exploring the role of pixel dwell time and fluence on the morphology of the created patterns. It was demonstrated that precise surface modification of polymeric surface can be achieved with higher pixel dwell time at low ion fluence.