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Mater. Sci. Technol., 20 (8), 993-995 (2004). [pdf] [proof] | ||
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Mechanical Property Optimization of Materials by Nanostructuring : Reduction of Resdidual Compressive Stress of a ta-C Films |
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Churl-Seung Lee, Kwang-Ryeol
Lee, and Sang-Hee Suh |
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Optimization of mechanical properties of a tetrahedral amorphous carbon (ta-C) thin film was attempted by nanostructuring. In this study, nanoscale multilayer films of ta-C and Si incorporated ta-C:Si layers were prepared. The residual compressive stress of the multilayer films decreased drastically without decreasing the hardness and the elastic modulus, compared to the monolithic films. No significant change in the atomic bond structure was observed in Raman spectrum analysis. These results thus provide a new possibility of applications of the ta-C film in harsh environments. | ||
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