Humidity Dependence of the Tribological Behavior of Diamond-like Carbon Films Against Steel Ball

Se Jun Park, Jong-Kuk Kim, Kwang-Ryeol Lee and Dae-Hong Ko
 

Diamond--like carbon (DLC) films deposited on Si (100) wafer by r.f.--plasma assisted chemical vapor deposition were friction tested by ball--on--disk type tribometer in various test environments. The friction tests were performed in an ambient air of relative humidity ranging from 0 to 90~\% or dry oxygen environment. We focused on the tribochemical reactions by analyzing chemical composition, chemical bond structure and agglomerated shape of the debris. High and unstable friction behavior was observed in both humid air and dry oxygen environment. In these environments, Auger spectrum analysis showed the debris contained large amount of Fe. Significant incorporation of Fe in the debris resulted from the wear of the steel ball which might be enhanced by the surface oxidation of the ball. On the other hand, very low friction coefficient was observed against sapphire ball even in dry oxygen environment. These results show that the increased friction coefficient of DLC film is closely related with the increased Fe concentration in the debris. Hence, the humidity dependence of friction coefficient is not an inherent tribological property of DLC film but results from the surface reaction of the steel ball with humid environment. Two possible reasons for the Fe rich debris to affect the friction behavior were suggested.