Effect of Environment on the Tribological Behavior of Si-incorporated Diamond-like Carbon films

Seung Ho Yang, Hosung Kong, Kwang-Ryeol Lee, Sejun Park, Dae Eun Kim

An experimental study was performed to discover the effect of environment on the tribological behavior of Si-incorporated diamond-like carbon (Si-DLC) film slid against a steel ball. The films were deposited on Si (100) wafers by a radio frequency glow discharge of mixtures of benzene and dilute silane gases. Expeiments using a ball-on-disk test-rig were performed in vacuum, dry air and ambient air. It was observed that coefficient of friction decreased as the environment changed from vacuum to dry air. Results also showed that low and stable friction related closely to the smoothening of track surfaces and the formation of silicon-rich oxide debris.