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Appl. Phys. Lett. 78 (5), 631-633 (2001). [PDF] |
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Effect of Residual Stress on the Raman Spectrum Analysis of Tetrahedral Amorphous Carbon Films |
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Jin-Koog Shin, Churlseung Lee, Kwang-Ryeol
Lee and Kwang Yong Eun |
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Tetrahedral amorphous carbon (ta-C) films deposited by the filtered
vacuum arc process have large compressive residual growth stress that depends
on the atomic-bond structure. We observed that the G-peak of the Raman
spectrum shifted to a higher wave number by 4.1+_0.5 cm-1/GPa due
to the residual compressive stress. This value agrees well with the
calculated Raman-peak shift of the graphite plane due to applied stress. By
considering the effect of residual stress on the G-peak position, we also
observe a similar dependence between the G-peak position and the atomic-bond
structure in both ta-C and hydrogenated amorphous carbon (a-C:H) films;
namely, that a higher sp2 bond content shifts the G-peak position
to a higher wave number. |
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