Surf. Coat. Technol. 112, 204-209 (1999). [PDF]

Tribological Behavior of Si Incorporated Diamond-like Carbon Films

Myoung-Geun Kim, Kwang-Ryeol Lee and Kwang Yong Eun

The tribological behavior between silicon-incorporated diamond-like carbon (Si-DLC) films and a steel ball was investigated from the viewpoint of tribochemical reaction. The films were deposited on Si (100) wafers from radio-frequency glow discharge of mixtures of benzene and dilute silane gases. The tribological behavior was investigated by using a ball-on-disk type wear rig in ambient atmosphere. The variation of the friction coefficient with the number of contact cycles was compared among the films having of various silicon concentrations from 0 to 9.5 at.%. It was observed that the friction coefficient decreased with incresing silicon concentration in the films. Furthermore, the friction behavior became more stable even at a small amount of silicon less than 0.5 at.% incorporated. By analyzing the composition of the debris formed, we could conclude that the low and stabilized friction coefficient is intimately related to the formation of the silicon-rich oxide debris. These results are consistent with a previously suggested mechanism that the hydrated silica debris results in the low friction coefficient in a humid environment.