J. Vac. Sci. Technol., B15 (2), 457-459 (1997). [PDF]

Self-Aligned Silicon Tips Coated with Diamondlike Carbon

Sanjo Lee, Sunnup Lee, Sungwoon Lee, D. Jeon and Kwang-Ryeol Lee

Silicon field emitter tips are coated with diamondlike carbon (DLC) film. Argon-ion bombardment of the tips increased the aspect ratio and helped uniform DLC coating. Using DLC-coated tips, we have fabricated a self-aligned gated field emission array.