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Carbon, 50, 404 (2012) [pdf] | ||
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Molecular Dynamics Simulation Study of the Growth of a Rough Amorphous Carbon Film by the Grazing Incidence of Energetic Carbon Atoms |
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Minwoong Joe, Myoung-Woon Moon, Jungsoo Oh, Kyu-Hwan Lee and Kwang-Ryeol Lee |
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The morphological evolution of an amorphous carbon film deposited by energetic carbon atoms of 75 eV with various angles of incidence was investigated by molecular dynamics simulation. Normal or near-normal incidence of carbon atoms resulted in a smooth surface of the deposited film. In contrast, a bump-like surface structure emerged and led to rough surfaces at grazing incidences, in agreement with the experiments. The bifurcated growth mode was explained by the impact-induced transport of atoms on the growing surface. The downhill transport of atoms on a sloping surface dominates at normal incidence, which suppresses the evolution of surface irregularities to form a rough surface. However, the dominance of uphill transport at a grazing incidence made the surface irregularities grow to a seed structure, which provided the shadowing effect during carbon deposition. This mechanism mediates initial seed formation and subsequent roughening together with shadowing effects under grazing incidence. |
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