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Conf.
Proc. of Transducer05, Seoul, Korea (2005) [PDF] |
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A New Capacitive
Displacement Sensor With High Accuracy and Long Range
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Moojin Kim, Wonkyu Moon,
Euisung Yoon, Kwang-Ryeol Lee
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A new capacitive displacement sensor is designed
and fabricated for measurement of a large displacement with very
high accuracy. This sensor is a kind of linear encoder with an array
of micro electrodes made by micromachining processes. The two patterned
electrodes on the sensor substrates are assembled facing each other
after being coated with thin dielectric film. Due to the thin dielectric
film, it is highly sensitive to displacement but minimizes expected
misalignments such as a tilting error. The sensor fabricated as
a sample has a grating of electrodes with a width of 100µm,
which is coated with a Diamond-Like Carbon(DLC) film 0.8 µm
thick. The proposed sensor was tested to conclude that its resolution
is 9.07 nanometers for the measuring range of 15 millimeters and
that the linearity error is expected to be less than 0.02% throughout
the measurable range. |
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