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Int.
Conf. Comp. Nanotechnol., Anaheim (California, USA) submitted (2005) [PDF] |
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The Structure and
Properties of ta-C Film with Dispersion of Incident Beam Energy
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S.-H. Lee, T.-Y. Kim,
S.-C. Lee, Y.-C. Chung, D. W. Brenner and K.-R. Lee
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Structures and
properties of tetrahedral amorphous carbon (ta-C) films are investigated
as a function of Gaussian distribution of incident carbon beam energy.
The ta-C films are synthesized by controlling the standard deviation
(σ) of Gaussian distribution from 0 to 10. The Brenner type interatomic
potential was used for carbon-carbon interaction. Densities (3.14
± 0.03 g/cm3) and sp3 bond fractions (53.7 ±1.7 %)
were not significantly changed with varying standard deviations
(σ). On the contrary, the compressive residual stresses of ta-C
film were changed remarkably with changing the standard deviation.
The residual stress was reduced from 6.0 to 4.2 GPa with the standard
deviations (σ). The decrease of residual stress corresponds to
the disappearance of a satellite peak of the second nearest neighbor
of the radial distribution function. The relationship between the
structure of ta-C film and dispersion of incident beam energy was
investigated. |
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