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Transducer
2005, [PDF] |
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A New Contact-Type
Displacement Sensor for Nano-Positioning Systems
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Moojin Kim, Wonkyu Moon,
Euisung Yoon and Kwang-Ryeol
Lee
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A new capacitive
displacement sensor is designed and fabricated for measurement of
a large displacement with very high accuracy. This sensor is a kind
of linear encoder with an array of micro electrodes made by micromachining
processes. The two patterned electrodes on the sensor substrates
are assembled facing each other after being coated with thin dielectric
film. Due to the thin dielectric film, it is highly sensitive to
displacement but minimizes expected misalignments such as a tilting
error. The sensor fabricated as a sample has a grating of electrodes
with a width of 100µm, which is coated with a Diamond-Like
Carbon(DLC) film 0.8 µm thick. The proposed sensor was tested
to conclude that its resolution is 9.07 nanometers for the measuring
range of 15 millimeters and that the linearity error is expected
to be less than 0.02% throughout the measurable range. |
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