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MRS
Symp. Proc. vol. 821, P3.22.1 (MRS
2004,
Spring Meeting, San Francisco, USA) [PDF] |
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Effect of Substrate
Bias on the Structure and Properties of W Incorporated Diamond-like
Carbon Films
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Aiying Wang and Kwang-Ryeol
Lee
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W incorporated diamond-like carbon (W-DLC) films were deposited on silicon (100) wafer by a hybrid deposition method combining an ion beam deposition of
carbon with a DC magnetron sputtering of tungsten. During the films deposition, a wide range of
negative bias voltage from 0 to -600 V was applied. W concentration in the film could be controlled by varying the Ar/C6H6
ratio in the supplying gas. In the present experimental condition, WC1-x
nano-sized particles were not observed in the amorphous carbon matrix.
Regardless of the W concentration in the film, it was found that the G-peak position of the Raman spectra had a lowest value at the bias voltage of -200 V, which represents the highest sp3 bond fraction in the films. The highest residual stress, hardness and Young’s
modulus were also observed when the negative
bias voltage was -200
V. This result shows that the mechanical properties of
W-DLC film were mainly dependent on the atomic bond structure of carbon. On the
other hand, the electrical resistivity significantly decreased by the W incorporation. |
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