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Proc.
of 7th Applied Diamond Conference, Tsukuba, Japan (2003). [PDF] |
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Frictional behavior of Nano-undulated
Surface
of Diamond-like carbon Films
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S. J. Park, C. S. Lee,
T. Y. Kim and K.-R. Lee, and D. H. Ko
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Frictional
behavior of nano-undulated diamond-like
carbon (DLC) films deposited by plasma
assisted chemical vapor deposition (PACVD) process was investigated. In order to prepare the nano-undulated DLC film, a Si
wafer with nano-sized Ni dots was prepared by rapid thermal annealing of Ni
thin films. Since the structure of DLC film deposited by PACVD was independent
of the substrate materials and the size of Ni nano dots could be controlled in
a systematic way by changing the thickness of the Ni film, we could
investigated the effect of nano-scale surface roughness on the tribological
behaviors of DLC films. The friction coefficient between steel ball and
undulated DLC films of the roughness varying from 0.6 to 14 nm was measured by
using a ball-on-disk type wear rig in ambient environment. The friction coefficients of undulated films were
in the range from 0.15 to 0.2, independent of the surface roughness. Wear of
the steel ball was much enhanced with higher content of Fe in the debris as the
roughness increased. However, the size of the debris decreased with increasing
roughness. Raman spectrum analysis revealed that the chemical bond structure of
the debris is significantly dependent on the surface roughness. The friction
behavior was discussed in terms of the chemical compositions and the
accumulation behavior of debris on the tribological behavior. |
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